Direct detection EBSD with the EDAX Clarity system

Session

EMAG - EM Spectroscopy

Authors

Dr. Joshua Lay (1)

Affiliations

1. Gatan/EDAX

Keywords

EBSD, electron backscatter diffraction, perovskites, solar cells, direct detection, low beam dose

Abstract text

The EDAX Clarity^™ is the world’s first and only direct detection EBSD system. Utilizing direct detection of electrons eliminates the noise associated with using a scintillator-based system when electron signal must first be converted to light and transferred to a sensor using lenses or fiber optics. This reduction in noise provides huge improvements in sensitivity, which can provide huge benefits to EBSD analysis.

In this talk, I will demonstrate how the EDAX Clarity can be used to perform ultra-low dose EBSD on materials previously unsuitable due to beam sensitivity, in addition to achieving exceptional spatial resolution and eliminating charging effects seen on non-conductive samples. In combination with APEX^™ software, NPAR^™, and our new spherical indexing technique, the EDAX Clarity provides a powerful tool for pushing the boundaries of EBSD as a technique.

Figure 1. EBSD orientation map taken using the EDAX Clarity. The sample is MAPbI₃ perovskite thin film. Collected with a Clarity Plus at 10 kV, 150 pA, 23 pps.